آی سی زاویه سنج 1 محور SCA61T-FAHH1G

آی سی زاویه سنج 1 محور SCA61T-FAHH1G

The sensors are based one an advanced “bulk micro machined” MEMS technology. The three dimensional structure (3D MEMS) of these sensors comprise a pendulum made of mono crystalline silicon. The pendulum is hermetically enclosed between two silicon discs. From this construction results a long term stable, high resolution und shock resistant sensor. A gas damping prevents overshooting and interfering resonance oscillation. The movement of the pendulum is measured capacitive by an ASIC.

• senses in positive and negative direction 
• high repeatability up to 0,01% over range 
• high resolution: up to 0,001% over range 
• shock resistance of the pendulum min. 50’000g 
• temperature range -40 .. +125°C 
• active and passive temperature compensation 
• 16x11x5 mm DIL12-pin in housing for SMD mounting 
• wide wanted signal: 0.5… 4.5V output over measuring range 

datasheet